Wafer Lithography Temperature Sensor

Name: Wafer Lithography Temperature Sensor
SKU: N/A

Element Type:Thin Film Platinum Resistance Thermistor
Element Dimensions:2.0mm x 2.3mm x 1.0mm,1.6mm x 2.0mm x 1.0mm,1.2mm x 2.0mm x 1.0mm
Lead Specifications:Length: 10 mm,Diameter: 0.2 mm
Lead Material: Platinum-nickel wire (optional: silver-palladium/platinum/silver-nickel)
Lead Tensile Strength:≥9 N
Insulation Resistance:100 MΩ at 20°C, >2 MΩ at 500°C
Temperature Coefficient (TCR):3850 ppm/°C
Operating Current:0.3 ~ 1 mA (self-heating effect to be considered)
Long-Term Stability:≤±0.04% resistance drift after 1000 hours at 50°C
Response Time:[Flow (V=0.4 m/s)]t0.5 = 0.05 s,t10 = 0.15 s[Airflow (V=2 m/s)]t0.5 = 3 s,t10 = 10 s
Self-Heating Coefficient:0.4°C/mW
Vibration Resistance:≥40g acceleration (10 ~ 2000 Hz frequency range)
Shock Resistance:≥100g acceleration (8 ms half-sine wave)
Packaging:Vacuum plastic packaging (other packaging formats available upon request)

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Product Description

Wafer Lithography Temperature Sensor: Precision Control for Advanced Semiconductor Manufacturing

Xi'an Tongzida Technology Co., Ltd. is a leading manufacturer and supplier of Wafer Lithography Temperature Sensors. Our progressed sensors offer unparalleled accuracy, unwavering quality, and strength for the most requesting semiconductor fabricating forms. With our cutting-edge thin-film platinum resistance innovation, we provide temperature estimation arrangements that meet the demanding guidelines of the world's beat foundries, IDMs, and OEMs.

Wafer Lithography Temperature Sensors

Introduction

In the high-stakes world of semiconductor fabrication, precision is everything. Our products are designed to provide the ultra-accurate temperature control essential for modern lithography processes. These sensors are the cornerstone of maintaining process stability, ensuring consistent quality, and maximizing yield in advanced chip production.

Why Choose Us?

Industry-Leading Precision: Our sensors offer sub-millidegree accuracy, crucial for nanometer-scale lithography.
Proven Reliability: With long-term stability drift of ≤0.04%, our sensors ensure consistent performance over time.
Customization Capabilities: We offer tailored solutions to meet your specific integration and performance requirements.
Global Compliance: Our products meet international standards and regulations, including ISO9001, RoHS, and CE certifications.
Comprehensive Support: From technical consultation to post-sale calibration, we're committed to your success.

Specifications

Parameter	Value
Element Type	Thin Film Platinum Resistance Thermistor
Element Dimensions	2.0mm x 2.3mm x 1.0mm, 1.6mm x 2.0mm x 1.0mm, 1.2mm x 2.0mm x 1.0mm
Lead Specifications	Length: 10 mm, Diameter: 0.2 mm
Lead Material	Platinum-nickel wire (optional: silver-palladium/platinum/silver-nickel)
Temperature Coefficient (TCR)	3850 ppm/°C
Operating Current	0.3 ~ 1 mA
Long-Term Stability	≤±0.04% resistance drift after 1000 hours at 50°C
Response Time	[Flow (V=0.4 m/s)] t0.5 = 0.05 s, t10 = 0.15 s
Vibration Resistance	≥40g acceleration (10 ~ 2000 Hz frequency range)
Shock Resistance	≥100g acceleration (8 ms half-sine wave)

Features

Ultra-high precision for critical lithography processes
Exceptional stability for long-term reliability
Rapid response time for real-time temperature control
Robust design for harsh semiconductor manufacturing environments
Versatile lead options for seamless integration
Vacuum-compatible for advanced lithography systems

Applications

Our Wafer Lithography Temperature Sensors excel in:

Advanced semiconductor fabrication
Photolithography process control
Wafer inspection and metrology
Thermal management in high-precision manufacturing
Research and development of next-generation chip technologies

Certificates

We maintain rigorous quality standards, evidenced by our ISO9001, RoHS, and CE certifications.

Packing and Delivery

Our sensors are vacuum-sealed to ensure pristine condition upon arrival, with customizable packaging options available.

FAQ

Q: How do your sensors ensure accuracy in lithography processes?
A: Our sensors provide sub-millidegree accuracy through advanced thin-film technology and precise calibration.

Q: Can these sensors integrate with existing lithography equipment?
A: Yes, we offer customization options to ensure compatibility with your current systems.

Q: What is the typical lead time for bulk orders?
A: We typically fulfill large orders within 4-6 weeks, depending on specifications and quantity.

Q: How do you support customers after purchase?
A: We offer comprehensive technical support, including calibration services and troubleshooting assistance.

Q: Are your sensors suitable for extreme temperature environments?
A: Our sensors perform reliably across a wide range, from -200°C to +850°C, meeting diverse application needs.

Contact Us

For inquiries about our Wafer Lithography Temperature Sensors or to discuss your specific requirements, please contact our sales team at sales11@xatzd.com. Our experts are ready to help you achieve precision temperature control in your semiconductor manufacturing processes.